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Reaction path research of TiC/Si diffusion couple experiment

Guoyou GAN , Xiuhua CHEN , Jingchao CHEN , Xiaolong ZHOU

材料科学技术(英)

Interaction between single crystal Si and TiC block was studied by electron probe micro analysis (EPMA). The distribution of the reaction products from Si to TiC is reported. The diffusion kinetics constant of Si is given. The implications of the observed microstructure are discussed.

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